@article{Levashov_Pogozhev_Shtansky_Kudryashov_Kiryukhantsev-Korneev_2013, title={Development and Application of New Multicomponent Electrode Materials for Deposition Technologies}, volume={2}, url={https://wcc.ep.liu.se/index.php/PSE/article/view/379}, DOI={10.3384/wcc2.10-13}, number={13}, journal={International Conference on Plasma Surface Engineering}, author={Levashov, Evgeny and Pogozhev, Yuri and Shtansky, Dmitry and Kudryashov, Alexander and Kiryukhantsev-Korneev, Philipp}, year={2013}, month={Mar.}, pages={10–13} }