@article{Hemberg_Konstantinidis_Dauchot_Snyder_2013, title={ION Flux–Film Structure Realtionship During Reactive Magnetron Sputtering of Tungsten}, volume={2}, url={https://wcc.ep.liu.se/index.php/PSE/article/view/386}, DOI={10.3384/wcc2.36-38}, abstractNote={Not available}, number={13}, journal={International Conference on Plasma Surface Engineering}, author={Hemberg, Axel and Konstantinidis, Stephanos and Dauchot, Jean-pierre and Snyder, Ryne}, year={2013}, month={Mar.}, pages={36–38} }