@article{Wang_Wang_Wang_Zhao_Su_Wang_Feng_2013, title={Influence of the Ion Beam Current on Microstructures and Optical Properties of Al2O3 Thin Films by Oxygen Ion Beam Assisted Pulse Reactive Magnetron Sputtering}, volume={2}, url={https://wcc.ep.liu.se/index.php/PSE/article/view/434}, DOI={10.3384/wcc2.219-222}, abstractNote={Not available}, number={13}, journal={International Conference on Plasma Surface Engineering}, author={Wang, Zhimin and Wang, Jinxiao and Wang, Yi and Zhao, Kai and Su, Xiaomei and Wang, Hu and Feng, Yudong}, year={2013}, month={Mar.}, pages={219–222} }