TY - JOUR AU - Levashov, Evgeny AU - Pogozhev, Yuri AU - Shtansky, Dmitry AU - Kudryashov, Alexander AU - Kiryukhantsev-Korneev, Philipp PY - 2013/03/04 Y2 - 2024/03/28 TI - Development and Application of New Multicomponent Electrode Materials for Deposition Technologies JF - International Conference on Plasma Surface Engineering JA - PSE VL - 2 IS - 13 SE - Session 4 - Physical Vapour Deposition I DO - 10.3384/wcc2.10-13 UR - https://wcc.ep.liu.se/index.php/PSE/article/view/379 SP - 10-13 AB - ER -