[1]
Tsalikis, D., Baig, C., Mavrantzas, V., Amanatides, E. and Mataras, D. 2013. Hierarchical simulation of microcrystalline PECVD silicon film growth and structure. International Conference on Plasma Surface Engineering. 2, 13 (Mar. 2013), 22–25. DOI:https://doi.org/10.3384/wcc2.22-25.