WANG, Zhimin; WANG, Jinxiao; WANG, Yi; ZHAO, Kai; SU, Xiaomei; WANG, Hu; FENG, Yudong. Influence of the Ion Beam Current on Microstructures and Optical Properties of Al2O3 Thin Films by Oxygen Ion Beam Assisted Pulse Reactive Magnetron Sputtering. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 219–222, 2013. DOI: 10.3384/wcc2.219-222. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/434. Acesso em: 10 dec. 2025.