ZIMMERMANN, B.; FIETZKE, F.; KLOSTERMANN, H.; MUNNIK, F.; MÖLLER, W.; LEHMANN, J. High rate PECVD of a-C:H coatings in a hollow cathode arc plasma. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 392–394, 2013. DOI: 10.3384/wcc2.392-394. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/476. Acesso em: 21 nov. 2024.