TAKAOKA, G.; RYUTO, H.; TAKEUCHI, M. Surface Interaction and Processing Using Polyatomic Cluster Ions. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 18–21, 2013. DOI: 10.3384/wcc2.18-21. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/381. Acesso em: 28 mar. 2024.