HEMBERG, A.; KONSTANTINIDIS, S.; DAUCHOT, J.- pierre; SNYDER, R. ION Flux–Film Structure Realtionship During Reactive Magnetron Sputtering of Tungsten. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 36–38, 2013. DOI: 10.3384/wcc2.36-38. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/386. Acesso em: 18 apr. 2024.