LEU, G. F.; GOURY, C.; MODRZYNSKI, P.; KLINDWORTH, M.; ELLERT, C. Scaling laws governing the NF3 cleaning plasma in a large area reactor. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 199–202, 2013. DOI: 10.3384/wcc2.199-202. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/429. Acesso em: 28 mar. 2024.