SKORO, N.; GOGOLIDES, E. Cleaning of Organic Contamination from EUV Optics Surfaces Using Hydrogen-based Plasmas. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 203–206, 2013. DOI: 10.3384/wcc2.203-206. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/430. Acesso em: 25 apr. 2024.