WANG, Z.; WANG, J.; WANG, Y.; ZHAO, K.; SU, X.; WANG, H.; FENG, Y. Influence of the Ion Beam Current on Microstructures and Optical Properties of Al2O3 Thin Films by Oxygen Ion Beam Assisted Pulse Reactive Magnetron Sputtering. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 219–222, 2013. DOI: 10.3384/wcc2.219-222. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/434. Acesso em: 23 apr. 2024.