ZOUBIAN, F.; TOMASELLA, E.; BOUSQUET, A.; CELLIER, J.; SAUVAGE, T. Effect of the rapid thermal annealing on the structure and optical properties of TaOxNy thin films deposited by reactive magnetron sputtering. International Conference on Plasma Surface Engineering, [S. l.], v. 2, n. 13, p. 443–446, 2013. DOI: 10.3384/wcc2.443-446. Disponível em: https://wcc.ep.liu.se/index.php/PSE/article/view/489. Acesso em: 24 apr. 2024.