Firek, Piotr, Bartlomiej Stonio, Rafal Chodun, Jan Szmidt, and Krzysztof Zdunek. 2013. “Plasma Etching of Aluminum Nitride Thin Films Prepared by Magnetron Sputtering Method”. International Conference on Plasma Surface Engineering 2 (13):211-14. https://doi.org/10.3384/wcc2.211-214.