Tsalikis, D., C. Baig, V. Mavrantzas, E. Amanatides, and D. Mataras. “Hierarchical Simulation of Microcrystalline PECVD Silicon Film Growth and Structure”. International Conference on Plasma Surface Engineering, vol. 2, no. 13, Mar. 2013, pp. 22-25, doi:10.3384/wcc2.22-25.