Hemberg, Axel, Stephanos Konstantinidis, Jean-pierre Dauchot, and Ryne Snyder. “ION Flux–Film Structure Realtionship During Reactive Magnetron Sputtering of Tungsten”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 36–38. Accessed November 21, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/386.