Koga, Kazunori, Tatsuya Urakawa, Giichiro Uchida, Kunihiro Kamataki, Yenwoon Seo, Nahi Itagaki, Masaharu Shiratani, Yuuichi Setsuhara, Makoto Sekine, and Masaru Hori. “Control of Deposition Profile and Properties of Plasma CVD Carbon Films”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 136–139. Accessed November 21, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/412.