Zoubian, F., E. Tomasella, A. Bousquet, J. Cellier, and T. Sauvage. “Effect of the Rapid Thermal Annealing on the Structure and Optical Properties of TaOxNy Thin Films Deposited by Reactive Magnetron Sputtering”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 443–446. Accessed November 23, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/489.