Yamane, Tsukasa, Sachiko Nakao, Yoshiaki Takeuchi, Hiroshi Muta, Ryuta Ichiki, Kiichiro Uchino, and Yoshinobu Kawai. “Measurements of SiH4/H2 VHF Plasma Parameters With Heated Langmuir Probe”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 459–462. Accessed November 21, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/493.