Levashov, Evgeny, Yuri Pogozhev, Dmitry Shtansky, Alexander Kudryashov, and Philipp Kiryukhantsev-Korneev. “Development and Application of New Multicomponent Electrode Materials for Deposition Technologies”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 10–13. Accessed July 3, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/379.