Takaoka, Gikan, H. Ryuto, and M. Takeuchi. “Surface Interaction and Processing Using Polyatomic Cluster Ions”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 18–21. Accessed March 29, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/381.