Frach, Peter, Christian Gottfried, Fred Fietzke, Heidrun Klostermann, Hagen Bartzsch, and Daniel Gloess. “High Power Density Pulse Magnetron Sputtering - Process and Film Properties”. International Conference on Plasma Surface Engineering 2, no. 13 (March 4, 2013): 80–83. Accessed April 26, 2024. https://wcc.ep.liu.se/index.php/PSE/article/view/397.