Zdunek K, Nowakowska-Langier K, Chodun R, Dora J. On the Injected Gas/Electric Power Relation for Deposition Efficiency Control During the Gims Deposition. PSE [Internet]. 2013 Mar. 4 [cited 2024 Nov. 21];2(13):215-8. Available from: https://wcc.ep.liu.se/index.php/PSE/article/view/433