Wang Z, Wang J, Wang Y, Zhao K, Su X, Wang H, Feng Y. Influence of the Ion Beam Current on Microstructures and Optical Properties of Al2O3 Thin Films by Oxygen Ion Beam Assisted Pulse Reactive Magnetron Sputtering. PSE [Internet]. 2013 Mar. 4 [cited 2024 Nov. 21];2(13):219-22. Available from: https://wcc.ep.liu.se/index.php/PSE/article/view/434