Zimmermann B, Fietzke F, Klostermann H, Munnik F, Möller W, Lehmann J. High rate PECVD of a-C:H coatings in a hollow cathode arc plasma. PSE [Internet]. 2013 Mar. 4 [cited 2024 Dec. 3];2(13):392-4. Available from: https://wcc.ep.liu.se/index.php/PSE/article/view/476