Yamane T, Nakao S, Takeuchi Y, Muta H, Ichiki R, Uchino K, et al. Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe. PSE [Internet]. 2013 Mar. 4 [cited 2025 Apr. 9];2(13):459-62. Available from: https://wcc.ep.liu.se/index.php/PSE/article/view/493