Control of nanoparticle formation in reactive plasmas and its application to fabrication of green energy devices

Authors

  • Masaharu Shiratani Graduate School of Information Science and Electrical Engineering, Kyushu University, Japan
  • G. Uchida Center of Plasma Nano-interface engineering, Kyushu University, Japan
  • K. Katamaki Center of Plasma Nano-interface engineering, Kyushu University, Japan
  • H. Seo Center of Plasma Nano-interface engineering, Kyushu University, Japan
  • N. Itagaki Center of Plasma Nano-interface engineering, Kyushu University, Japan
  • K. Koga Center of Plasma Nano-interface engineering, Kyushu University, Japan

DOI:

https://doi.org/10.3384/wcc2.100-103

Abstract

We are developing “plasma nano-factories” which are bottom-up guided assembly processes and miniature versions of macroscopic conventional factories. Here, we report plasma-based control of the size, size distribution, and structure of nanoparticles, their agglomeration and transport as well as sticking. We apply nano-particle films to green energy devices such as low energy consumption LSI’s, solar cells, and Li ion batteries. Our results show that core-shell nanoparticles are effective for improving performances of these devices.

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Published

2013-03-04

How to Cite

1.
Shiratani M, Uchida G, Katamaki K, Seo H, Itagaki N, Koga K. Control of nanoparticle formation in reactive plasmas and its application to fabrication of green energy devices. PSE [Internet]. 2013 Mar. 4 [cited 2024 Dec. 22];2(13):100-3. Available from: https://wcc.ep.liu.se/index.php/PSE/article/view/402

Issue

Vol. 2 No. 13 (2012): 13th International Conference on Plasma Surface Engineering September 10 - 14, 2012, in Garmisch-Partenkirchen, Germany

Section

Session 14 - Plasma Diffusion Treatment