Features of DC magnetron sputtering of mosaic copper-graphite targets

Authors

  • Valery Mitin Naco technologies, Riga, Latvia
  • Yury Mankelevich SINP MSU, Moscow, Russian Federation
  • Alexander Pal SINP MSU, Moscow, Russian Federation
  • Tatyana Rakhimova SINP MSU, Moscow, Russian Federation
  • Alexey Ryabinkin SINP MSU, Moscow, Russian Federation
  • Alexander Serov SINP MSU, Moscow, Russian Federation
  • Alexey Mitin VNIINM, Moscow, Russian Federation
  • Nikolay Krasnobaev VNIINM, Moscow, Russian Federation

DOI:

https://doi.org/10.3384/wcc2.227-230

Abstract

Not available

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Published

2013-03-04

How to Cite

1.
Mitin V, Mankelevich Y, Pal A, Rakhimova T, Ryabinkin A, Serov A, Mitin A, Krasnobaev N. Features of DC magnetron sputtering of mosaic copper-graphite targets. PSE [Internet]. 2013 Mar. 4 [cited 2024 Apr. 26];2(13):227-30. Available from: https://wcc.ep.liu.se/index.php/PSE/article/view/436

Issue

Vol. 2 No. 13 (2012): 13th International Conference on Plasma Surface Engineering September 10 - 14, 2012, in Garmisch-Partenkirchen, Germany

Section

Poster: Physical vapour deposition